Title :
Investigation of Soft X-Ray Emission from Compact Neon Plasma Focus
Author :
Guixin Zhang ; Sing Lee ; Lee, P.
Author_Institution :
Dept. of EEA, Tsinghua Univ., Beijing
Abstract :
Summary form only given. Two different compact plasma focus (PF) devices were developed as soft X-ray sources for microelectronic lithography. This paper will report investigation of soft X-ray emission from plasma focus. Experiments were carried out under various experimental conditions, such as different configurations of PF chamber, different anode lengths, different initial neon pressures, different charging voltages, different polarities of central electrodes as well as different repetition rates. The spectrum of soft X-ray was investigated by flat crystal spectrography as well as filtered multi channel PIN detectors
Keywords :
neon; plasma X-ray sources; plasma diagnostics; plasma focus; Ne; filtered multichannel PIN detectors; flat crystal spectrography; microelectronic lithography; neon plasma focus; soft X-ray emission; Anodes; Electrodes; Lithography; Microelectronics; Plasma devices; Plasma sources; Plasma x-ray sources; Voltage; X-ray detection; X-ray detectors;
Conference_Titel :
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-9300-7
DOI :
10.1109/PLASMA.2005.359272
