DocumentCode
2570081
Title
Investigation of Soft X-Ray Emission from Compact Neon Plasma Focus
Author
Guixin Zhang ; Sing Lee ; Lee, P.
Author_Institution
Dept. of EEA, Tsinghua Univ., Beijing
fYear
2005
fDate
20-23 June 2005
Firstpage
222
Lastpage
222
Abstract
Summary form only given. Two different compact plasma focus (PF) devices were developed as soft X-ray sources for microelectronic lithography. This paper will report investigation of soft X-ray emission from plasma focus. Experiments were carried out under various experimental conditions, such as different configurations of PF chamber, different anode lengths, different initial neon pressures, different charging voltages, different polarities of central electrodes as well as different repetition rates. The spectrum of soft X-ray was investigated by flat crystal spectrography as well as filtered multi channel PIN detectors
Keywords
neon; plasma X-ray sources; plasma diagnostics; plasma focus; Ne; filtered multichannel PIN detectors; flat crystal spectrography; microelectronic lithography; neon plasma focus; soft X-ray emission; Anodes; Electrodes; Lithography; Microelectronics; Plasma devices; Plasma sources; Plasma x-ray sources; Voltage; X-ray detection; X-ray detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location
Monterey, CA
ISSN
0730-9244
Print_ISBN
0-7803-9300-7
Type
conf
DOI
10.1109/PLASMA.2005.359272
Filename
4198531
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