DocumentCode
2570094
Title
Controlling the Optimize Deposition of Thin Film in D.C Plasma Magnetron Sputtering and Measuring the Surface Conductivity by Hall Effect
Author
Bahadori, F. ; Mahmoudzadeh, Mahdi
Author_Institution
Dept. of Plasma Phys., Middle East Tech. Univ., Ankara
fYear
2005
fDate
20-23 June 2005
Firstpage
222
Lastpage
222
Abstract
Summary form only given. In our investigation, thin films of copper and brass were prepared by D.C. magnetron sputtering and coated on flat glasses. We have investigated the effects of their thicknesses on electrical and optical properties of the films. Also we have discussed on how we can control the rate of deposition in the set of D.C. plasma sputtering magnetron by controlling the beam and nanostructures. Then, we have measured the conductivity of the surfaces by Hall effect. So the results have shown that the resistivity of the thin films is a function of applied voltage. Moreover, we have shown that the decrease in resistivity by increasing the thickness is due to the increment in the carrier concentrations with increase in the thicknesses of films
Keywords
Hall effect; brass; carrier density; copper; electrical resistivity; metallic thin films; plasma materials processing; sputter deposition; surface conductivity; Cu; CuZn; DC plasma magnetron sputtering; Hall effect; SiO2; carrier concentrations; electrical properties; nanostructures; optical properties; surface conductivity; thin film deposition; thin film resistivity; Conductivity measurement; Copper; Glass; Hall effect; Nanostructures; Optical films; Particle beams; Plasma measurements; Plasma properties; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location
Monterey, CA
ISSN
0730-9244
Print_ISBN
0-7803-9300-7
Type
conf
DOI
10.1109/PLASMA.2005.359273
Filename
4198532
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