• DocumentCode
    2570094
  • Title

    Controlling the Optimize Deposition of Thin Film in D.C Plasma Magnetron Sputtering and Measuring the Surface Conductivity by Hall Effect

  • Author

    Bahadori, F. ; Mahmoudzadeh, Mahdi

  • Author_Institution
    Dept. of Plasma Phys., Middle East Tech. Univ., Ankara
  • fYear
    2005
  • fDate
    20-23 June 2005
  • Firstpage
    222
  • Lastpage
    222
  • Abstract
    Summary form only given. In our investigation, thin films of copper and brass were prepared by D.C. magnetron sputtering and coated on flat glasses. We have investigated the effects of their thicknesses on electrical and optical properties of the films. Also we have discussed on how we can control the rate of deposition in the set of D.C. plasma sputtering magnetron by controlling the beam and nanostructures. Then, we have measured the conductivity of the surfaces by Hall effect. So the results have shown that the resistivity of the thin films is a function of applied voltage. Moreover, we have shown that the decrease in resistivity by increasing the thickness is due to the increment in the carrier concentrations with increase in the thicknesses of films
  • Keywords
    Hall effect; brass; carrier density; copper; electrical resistivity; metallic thin films; plasma materials processing; sputter deposition; surface conductivity; Cu; CuZn; DC plasma magnetron sputtering; Hall effect; SiO2; carrier concentrations; electrical properties; nanostructures; optical properties; surface conductivity; thin film deposition; thin film resistivity; Conductivity measurement; Copper; Glass; Hall effect; Nanostructures; Optical films; Particle beams; Plasma measurements; Plasma properties; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
  • Conference_Location
    Monterey, CA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-9300-7
  • Type

    conf

  • DOI
    10.1109/PLASMA.2005.359273
  • Filename
    4198532