DocumentCode
2570769
Title
2002 International Semiconductor Conference. CAS 2002 Proceedings (Cat. No.02TH8618)
Volume
1
fYear
2002
fDate
8-12 Oct. 2002
Keywords
integrated circuit reliability; integrated circuit testing; micro-optics; micromachining; micromechanical devices; microsensors; microwave devices; millimetre wave devices; nanotechnology; power semiconductor devices; semiconductor device reliability; semiconductor device testing; material characterization methods; micromachined devices; microoptics; microphotonics; microsystems; microtransducers; microwave applications; millimeter wave applications; nanoengineering; nanoscience; power devices; reliability; semiconductor device physics; testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Conference_Location
Sinaia, Romania
Print_ISBN
0-7803-7440-1
Type
conf
DOI
10.1109/SMICND.2002.1105787
Filename
1105787
Link To Document