DocumentCode
2570846
Title
A model for friction in atomic force microscopy
Author
Salapaka, S. ; Dahleh, M.
Author_Institution
Dept. of Mech. & Environ. Eng., California Univ., Santa Barbara, CA, USA
Volume
3
fYear
2000
fDate
2000
Firstpage
2102
Abstract
A mass-spring-damper model has been presented to describe the cantilever-sample dynamics in an atomic force microscope (AFM). Friction has been incorporated in this model by using Johnson-Kendall-Roberts (JKR) theory for elastic contacts. It has been validated by exhibiting some characteristic features (such as stick-slip behavior) observed in experiments with AFMs. A control law has been designed so that the piezoelectric tube in an AFM moves in a desired manner in spite of the friction. Simulation results are presented to illustrate the model and performance of the controllers
Keywords
atomic force microscopy; closed loop systems; friction; piezoelectric devices; position control; Johnson-Kendall-Roberts theory; atomic force microscopy; cantilever-sample dynamics; elastic contacts; friction model; mass-spring-damper model; piezoelectric tube; stick-slip behavior; Adhesives; Atomic force microscopy; Force control; Force feedback; Friction; Laser beams; Laser feedback; Optical control; Optical feedback; Structural beams;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2000. Proceedings of the 2000
Conference_Location
Chicago, IL
ISSN
0743-1619
Print_ISBN
0-7803-5519-9
Type
conf
DOI
10.1109/ACC.2000.879572
Filename
879572
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