Title :
Packaged MEMS tunable resonators
Author :
Pothier, A. ; Blondy, P. ; Cros, D. ; Verdeyme, S. ; Guillon, P. ; Champeaux, C. ; Tristant, P. ; Catherinot, A.
Author_Institution :
IRCOM, Limoges Univ., France
Abstract :
In this paper, basic resonators including MEMS variable capacitor types are presented. MEMS structures allow tuning of the cell center frequency and input-output coupling. To improve the tunable resonator quality factor, the circuit is packaged using bulk micromachining techniques. MEMS varactors are associated in a parallel configuration to improve their quality factor. At 27 GHz, a semi-lumped resonator with a quality factor of 130 has been fabricated. MEMS varactors are not decoupled from the resonator to improve the Q, as it is usually done with low-Q semiconductor diodes.
Keywords :
Q-factor; micromachining; micromechanical resonators; microwave devices; millimetre wave devices; packaging; tuning; varactors; 27 GHz; MEMS packaged tunable microwave resonators; MEMS structures; Q factor; bulk micromachining; cell center frequency tuning; input-output coupling; low Q semiconductor diodes; mm-wave resonators; parallel configured MEMS varactors; resonator quality factor; semi-lumped resonators; varactor decoupling; variable capacitors; Capacitors; Circuit optimization; Coupling circuits; Frequency; Micromechanical devices; Packaging; Q factor; Tunable circuits and devices; Tuning; Varactors;
Conference_Titel :
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Print_ISBN :
0-7803-7440-1
DOI :
10.1109/SMICND.2002.1105795
