Title :
Surface-micromachined photonic integrated circuits
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be fabricated by the same process. This enables monolithic integration of an entire free-space optical system onto a single chip. In the past several years, we have shown that refractive and diffractive microlenses, micropositioners with multiple degrees of freedom (e.g., rotary or XYZ stages), and precision microactuators can be fabricated by standard three-layer polysilicon surface-micromachining processes
Keywords :
integrated optoelectronics; micro-optics; microlenses; micromachining; micromechanical devices; mirrors; optical fabrication; diffractive microlenses; entire free-space optical system; micropositioners; monolithic integration; multiple degrees of freedom; optical MEMS; optical MEMS devices; optical fabrication; precision microactuators; refractive microlenses; single chip; standard three-layer polysilicon surface-micromachining processes; surface-micromachined photonic integrated circuits; Integrated circuit technology; Integrated optics; Lenses; Microelectromechanical devices; Micromechanical devices; Monolithic integrated circuits; Optical devices; Optical diffraction; Optical refraction; Photonic integrated circuits;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879599
