Magnetostrictive 2-D scanners and pig-tailed tunable MEMS filters-studies on vacuum packaging and interconnection of optical MEMS

The key concept of micromachining technologies is to extend the VLSI fabrication capability to realize three-dimensional microsystems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro gears and motors can be made by surface micromachining processes. Precise V-grooves and moles going through the substrate can be etched bp dry and wet etching. Such micromachining technologies have the following implications for optical systems: integration of devices; accurate pre/passive alignment; feature size comparable to wavelength; arrayed and repetitive structures; wavelength independence; free-space optics with short propagation path; high sensitivity and fast response; local servo feedback; hermetic/vacuum packaging. Examples of these implications are given for a pigtailed silicon platform for integrating optical fibres and micromachined devices, and a 2D micro-optical scanner