Title :
Commercialization of optical MEMS-volume manufacturing approaches
Author :
Markus, Karen W.
Author_Institution :
JDS Uniphase Co., Research Triangle Park, NC, USA
Abstract :
This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed
Keywords :
attenuators; equalisers; micro-optics; micromachining; mirrors; optical fabrication; optical interconnections; optical switches; photolithography; semiconductor device manufacture; sputter etching; Telecordia qualification requirements; equalizers; micromachining; mirrors; optical MEMS commercialization; optical cross-connects; process technologies; switches; variable optical attenuators; volume manufacturing approaches; wafer-scale projection lithography; Commercialization; Large-scale systems; Manufacturing; Material properties; Micromechanical devices; Mirrors; Optical attenuators; Optical devices; Optical sensors; Surface topography;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879601
