Title :
Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device
Author :
Konno, Nobuaki ; Tsugai, Masahiro ; Yoshikawa, Eiji ; Usami, Teruo ; Fujita, Hiroyuki
Author_Institution :
Ind. Electron. & Syst. Lab., Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and stable since there are no metal leads on the vibrating silicon torsional beams and the mirror is supported by 6 beams. We present an improved device having much higher performance through both design and process optimization based on detailed FEM simulations and refinement of the fabrication process
Keywords :
elemental semiconductors; finite element analysis; frequency response; micro-optics; micromachining; micromechanical resonators; mirrors; modal analysis; optical fabrication; optical scanners; optimisation; silicon; sputter etching; torsion; FEM simulation; ICP RIE; PZT plate driven; Si; cantilever beam; design optimization; fabrication process; frequency response; improved performance; link beam driven; link beam leverage; miniaturized scanning mirror device; modal response; process optimization; torsional resonant mirror; Ceramics; Design optimization; Fabrication; Frequency; Mirrors; Monitoring; Resonance; Silicon; Structural beams; Voltage;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879603
