Title :
A new self-oscillation loop for MEMS vibratory gyroscopes
Author :
Wang, Zhanfei ; Li, Zhihong ; Lu, Wengao
Author_Institution :
Peking Univ., Beijing
Abstract :
In this paper we analyze self-oscillation loop for MEMS vibratory gyroscopes, present analytical equations for system design, and propose a new self-oscillation loop to improve stability of the drive control system and the recovery speed of oscillation amplitude after a shock.
Keywords :
PI control; drives; gyroscopes; micromechanical devices; oscillations; stability; MEMS vibratory gyroscopes; PI controller; drive control system stability; self-oscillation loop; Control systems; Detectors; Electrostatic analysis; Equations; Force control; Force feedback; Gyroscopes; Micromechanical devices; Proportional control; Velocity control; AGC; MEMS; PI; Self-oscillation; gyroscope;
Conference_Titel :
ASIC, 2007. ASICON '07. 7th International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4244-1132-0
Electronic_ISBN :
978-1-4244-1132-0
DOI :
10.1109/ICASIC.2007.4415812
