Title :
Compact Fourier transform spectrometer based on sampling a standing wave
Author :
Kung, H.L. ; Bhalotra, S.R. ; Mansell, J.D. ; Miller, D.A.B.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
We demonstrate a Fourier-transform spectrometer based on a large-displacement MEMS mirror and sampling an optical standing wave with a thin photoconductor. The 1D design should permit integration of many spectrometers into an imaging array
Keywords :
Fourier transform spectrometers; electrostatic actuators; micro-optics; micromachining; mirrors; ultraviolet spectrometers; 1D design; AC photocurrent; Fourier-transform spectrometer; compact spectrometer; imaging array; large-displacement MEMS mirror; movable mirror; optical standing wave sampling; spectrometer integration; thin photoconductor; time domain signal; Fingers; Gold; Micromechanical devices; Mirrors; Optical films; Optical interferometry; Photoconductivity; Sampling methods; Silicon; Spectroscopy;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879607
