DocumentCode :
2571450
Title :
1×8 micro-mechanical switches based on moving waveguides for optical fiber network switching
Author :
Oilier, E. ; Chabrol, Claude ; Enot, Thierry ; Brunet-Manquat, Patrick ; Margail, Jacques ; Mottier, Patrick
Author_Institution :
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fYear :
2000
fDate :
2000
Firstpage :
39
Lastpage :
40
Abstract :
The feasibility of 1×N switches based on moving waveguides has been demonstrated. Solutions have been developed to overcome the technological hurdles encountered. The elementary 1×2 switch performances have been strongly improved: very low crosstalk (<-42 dB), low optical losses (1.5 dB), insensitivity to wavelength (<0.2 dB, 1250-1650 nm wavelength range) and polarisation (<0.3 dB), low driving voltage (<70 V), low switching time (<5 ms). Due to the results associated with a size reduction and a very accurate and reproducible control of residual deflection, we have demonstrated that the fabrication of larger 1×N switches is possible by cascading 1×2 switches. 1×8 switches have been fabricated. Moreover an 8×8 switching matrix has been demonstrated using arrays of 1×8 switches. These demonstrations show that this technology can address the different switching applications
Keywords :
micro-optics; micromachining; optical crosstalk; optical losses; optical planar waveguides; optical switches; sputter etching; wavelength division multiplexing; 1.5 dB; 1250 to 1650 nm; WDM; cantilever beam; electrostatic actuator; improved performance; index matching; low driving voltage; low optical losses; low switching time; micromechanical switches; moving waveguides; optical fiber network switching; polarisation insensitivity; residual deflection control; silica waveguides; size reduction; switch arrays; switching matrix; very low crosstalk; wavelength insensitivity; Insertion loss; Optical control; Optical crosstalk; Optical device fabrication; Optical devices; Optical fiber networks; Optical losses; Optical switches; Optical waveguides; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
Type :
conf
DOI :
10.1109/OMEMS.2000.879616
Filename :
879616
Link To Document :
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