DocumentCode
2571499
Title
CAD tools for optical MEMS
Author
Gilbert, John R. ; Morris, Arthur S.
Author_Institution
Microcosm Technol. Inc., Cambridge, MA, USA
fYear
2000
fDate
2000
Firstpage
45
Lastpage
46
Abstract
As MOEMS transition from the laboratory to production products, a complete design flow is necessary for rapid product development. This paper presents a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification
Keywords
design for manufacture; electrostatic actuators; micro-optics; mirrors; optical control; optical design techniques; optical engineering computing; product development; rapid prototyping (industrial); semiconductor device models; software tools; 3D Gaussian beam optics library; CAD tools; MOEMS design flow; MemSys package; PI feedback; accurate bottom-up verification; efficient top-down design; free-space optics; macro-model; optical MEMS; overall system specifications; rapid product development; solid model; system model; torsional mirror; Circuit simulation; Integrated optics; Libraries; Micromechanical devices; Mirrors; Optical beams; Optical devices; Optical distortion; Optical feedback; Optical noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879619
Filename
879619
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