Title :
CAD tools for optical MEMS
Author :
Gilbert, John R. ; Morris, Arthur S.
Author_Institution :
Microcosm Technol. Inc., Cambridge, MA, USA
Abstract :
As MOEMS transition from the laboratory to production products, a complete design flow is necessary for rapid product development. This paper presents a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification
Keywords :
design for manufacture; electrostatic actuators; micro-optics; mirrors; optical control; optical design techniques; optical engineering computing; product development; rapid prototyping (industrial); semiconductor device models; software tools; 3D Gaussian beam optics library; CAD tools; MOEMS design flow; MemSys package; PI feedback; accurate bottom-up verification; efficient top-down design; free-space optics; macro-model; optical MEMS; overall system specifications; rapid product development; solid model; system model; torsional mirror; Circuit simulation; Integrated optics; Libraries; Micromechanical devices; Mirrors; Optical beams; Optical devices; Optical distortion; Optical feedback; Optical noise;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879619
