Title :
Fluidic self-assembly of micromirrors onto surface micromachined actuators
Author :
Srinivasan, Uthara ; Helmbrecht, Michael ; Rembe, Christian ; Muller, Richard S. ; Howe, Roger T.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the actuator platforms is achieved by pattern matching hydrophobic binding sites on the underside of the mirror and on the platform
Keywords :
micro-optics; micromachining; mirrors; optical fabrication; pattern matching; self-assembly; silicon; Si; actuator platforms; fluidic self-assembly; micromirrors; mirror; pattern matching hydrophobic binding sites; sub-micron precision self-alignment; surface micromachined actuator array; surface micromachined actuators; ultra-flat single-crystal silicon micromirrors; Actuators; Assembly; Etching; Fabrication; Fluidic microsystems; Gold; Microfluidics; Micromirrors; Mirrors; Self-assembly;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879626
