Title :
Polysilicon 3D-mirror frequency shifter for WDM fibre-optic communication applications
Author :
Zhang, X.M. ; Chollet, F. ; Chau, F.S. ; Quan, C. ; Liu, A.Q.
Author_Institution :
Dept. of Mech. & Production Eng., Nat. Univ. of Singapore, Singapore
Abstract :
This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 μm to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers
Keywords :
Fabry-Perot resonators; electrostatic actuators; micro-optics; micromachining; mirrors; optical communication equipment; optical fabrication; optical switches; silicon; wavelength division multiplexing; 1.5 micron; Fabry-Perot microcavity length; WDM fibre-optic communication; channel selection; design; fabrication; flat transmission characteristic; intensity modulation; low insertion loss; micromechanical electrostatic actuators; minimal interchannel crosstalk; monolithic integrated frequency shifter; movable 3D-mirror; polysilicon 3D-mirror frequency shifter; testing; wavelength shifter; Biomembranes; Frequency; Integrated optics; Optical crosstalk; Optical design; Optical device fabrication; Optical fiber communication; Optical fiber devices; Optical fiber testing; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879635
