Title :
Tunable VCSEL with integrated heater and planar waveguide wavelength monitor
Author :
Blau, G. ; Gale, M.T. ; Söchtig, J. ; Zscholle, Ch. ; Hövel, R. ; Gulden, K.
Author_Institution :
Centre Suisse d´´Electronique et de Microtechnique SA, Zurich, Switzerland
Abstract :
A compact solution for tuning and monitoring the emission waveguide of a single mode VCSEL (λ=760 nm) at constant output power is presented. The key element within the micro system is a chirped grating waveguide coupler combined with a diffractive collimating lens and a two-segment detector. The resulting wavelength measurement resolution of the chip is in the range of 0.06 nm
Keywords :
diffraction gratings; diffractive optical elements; laser tuning; laser variables measurement; microlenses; optical couplers; optical fabrication; optical planar waveguides; replica techniques; surface emitting lasers; 760 nm; DOE; UV embossing; chirped grating waveguide coupler; constant output power; corrugated gratings; diffractive collimating lens; direct laser writing; integrated heater; optical microsystems; organically modified ceramics; planar waveguide wavelength monitor; replication; single mode VCSEL; tunable VCSEL; two-segment detector; wavelength measurement resolution; Chirp; Cogeneration; Collimators; Detectors; Diffraction gratings; Lenses; Monitoring; Planar waveguides; Power generation; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879637
