Title :
Trends in semiconductor equipment, materials, and processing technology
Author_Institution :
SEMI, SEMATECH, Austin, TX, USA
Abstract :
Today´s technological revolution would not be possible without the continuing increase in our scientific understanding of materials and phenomena, along with the processing and synthesis, required for high volume, low cost integrated circuit (IC) manufacturing. The exponential growth in functionality per dollar has been made through steady increases in complexity and density of ICs. This high productivity growth rate can only continue through increased understanding and control of the materials and processes used to manufacture state-of-the-art ICs. The suppliers to the semiconductor manufacturing industry are increasingly developing this knowledge base, along with the equipment required to manufacture future generations of ICs.
Keywords :
integrated circuit manufacture; semiconductor technology; integrated circuit manufacturing; semiconductor equipment; semiconductor materials; semiconductor processing technology; Circuit testing; Consumer electronics; Electronics industry; Integrated circuit technology; Manufacturing industries; Manufacturing processes; Productivity; Research and development; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746236