DocumentCode
2571817
Title
Trends in semiconductor equipment, materials, and processing technology
Author
Peercy, P.S.
Author_Institution
SEMI, SEMATECH, Austin, TX, USA
fYear
1998
fDate
6-9 Dec. 1998
Firstpage
14
Lastpage
17
Abstract
Today´s technological revolution would not be possible without the continuing increase in our scientific understanding of materials and phenomena, along with the processing and synthesis, required for high volume, low cost integrated circuit (IC) manufacturing. The exponential growth in functionality per dollar has been made through steady increases in complexity and density of ICs. This high productivity growth rate can only continue through increased understanding and control of the materials and processes used to manufacture state-of-the-art ICs. The suppliers to the semiconductor manufacturing industry are increasingly developing this knowledge base, along with the equipment required to manufacture future generations of ICs.
Keywords
integrated circuit manufacture; semiconductor technology; integrated circuit manufacturing; semiconductor equipment; semiconductor materials; semiconductor processing technology; Circuit testing; Consumer electronics; Electronics industry; Integrated circuit technology; Manufacturing industries; Manufacturing processes; Productivity; Research and development; Semiconductor device manufacture; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-4774-9
Type
conf
DOI
10.1109/IEDM.1998.746236
Filename
746236
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