Title :
640/spl times/480 back-illuminated CCD imager with improved blooming control for night vision
Author :
Burke, B.E. ; Reich, R.K. ; Gregory, J.A. ; McGonagle, W.H. ; Waxman, A.M. ; Savoye, E. ; Kosicki, B.B.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
Abstract :
We describe a back-illuminated 640/spl times/480 CCD imager which operates at 30-Hz frame rates with 5 e/sup -/ noise and which is capable of high resolution down to near starlight illumination levels. A new process for fabricating a compact blooming control is also described.
Keywords :
CCD image sensors; 30 Hz; 480 pixel; 640 pixel; CCD imager; back illumination; blooming control; fabrication; frame rate; night vision; noise; resolution; Annealing; Charge coupled devices; Etching; Image resolution; Laser beams; Lighting; Night vision; Optical pulses; Optical surface waves; Surface treatment;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746240
