Title :
Characterisation of CMOS compatible uncooled microbolometers
Author :
Lambkin, Paul ; Lane, Bill ; O´Heifearnan, I. ; Gillham, John ; Eatton, R.
Author_Institution :
Nat. Microelectron. Res. Centre, Univ. Coll. Cork, Ireland
Abstract :
A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 μm waveband is ~40%
Keywords :
bolometers; focal planes; micro-optics; micromachining; specific heat; thermal conductivity; 8 to 14 micron; CMOS compatible process; TCR; electrothermal characterisation; freestanding microbolometer; heat capacity; robust five-level process; sensitive resistive element; surface micromachining; thermal conductance; uncooled microbolometers; Absorption; Bolometers; CMOS process; Cameras; Plasma temperature; Resistors; Temperature sensors; Thermal conductivity; Thermal resistance; Titanium;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879645
