DocumentCode
2571925
Title
Characterisation of CMOS compatible uncooled microbolometers
Author
Lambkin, Paul ; Lane, Bill ; O´Heifearnan, I. ; Gillham, John ; Eatton, R.
Author_Institution
Nat. Microelectron. Res. Centre, Univ. Coll. Cork, Ireland
fYear
2000
fDate
2000
Firstpage
99
Lastpage
100
Abstract
A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 μm waveband is ~40%
Keywords
bolometers; focal planes; micro-optics; micromachining; specific heat; thermal conductivity; 8 to 14 micron; CMOS compatible process; TCR; electrothermal characterisation; freestanding microbolometer; heat capacity; robust five-level process; sensitive resistive element; surface micromachining; thermal conductance; uncooled microbolometers; Absorption; Bolometers; CMOS process; Cameras; Plasma temperature; Resistors; Temperature sensors; Thermal conductivity; Thermal resistance; Titanium;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879645
Filename
879645
Link To Document