Design, fabrication and packaging of micro-optical components and systems

Author

Kopola, Harri ; Hiltunen, Jussi ; Hakkila, Jonna ; Karioja, Pentti ; Kololnoma, T. ; Karkkainen, Ari ; Paaso, Janne ; Rantala, Juha T.

Author_Institution

VTT Electron. & Infotech Oulu, Finland

fYear

2000

fDate

2000

Firstpage

105

Lastpage

106

Abstract

The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented

Keywords

integrated optics; light emitting diodes; micro-optics; microlenses; micromachining; modules; optical fabrication; photolithography; semiconductor device packaging; diffractive axicon lens; direct lithographic writing; direct patternable hybrid material; fabrication; micro-optical components; microcavity organic LED; micromachining; multi-technological module; optical microsystems; optoelectronic microsystems; packaging solutions; system design concept; system-on-a-package based module; Electronics packaging; Fabrication; Fiber lasers; Microoptics; Optical coupling; Optical materials; Optical receivers; Optical signal processing; Optical transmitters; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879648

Filename

879648