Closed-loop feedback-control system for improved tracking in magnetically actuated micromirrors

Author

Pannu, Satinderpall ; Chang, Carl ; Muller, Richard S. ; Pisano, Albert P.

Author_Institution

Sensor & Actuator Center, California Univ., Berkeley, CA, USA

fYear

2000

fDate

2000

Firstpage

107

Lastpage

108

Abstract

We have demonstrated a closed-loop feedback-control system that dramatically improves the dynamic response, settling time, and external disturbance rejection of a magnetic micromirror. Proportional, proportional-derivative and proportional-derivative-integral controllers (implemented on a digital signal processor) were used to increase positioning accuracy of the micromirror which can, for example, lead to increased optical-channel density in fiber-optic switches

Keywords

closed loop systems; dynamic response; electromagnetic actuators; feedback; micro-optics; microactuators; mirrors; optical communication equipment; optical control; optical scanners; optical switches; position control; proportional control; three-term control; two-term control; PI control; PID control; closed-loop feedback-control system; digital signal processor; dynamic response; external disturbance rejection; feedforward component; integral compensator; magnetically actuated micromirrors; optical scanner; optical switch; positioning accuracy; proportional control; quality factor; settling time; torsion beam; transfer function; Control systems; Laser feedback; Micromirrors; Mirrors; Optical control; Optical feedback; Optical sensors; PD control; Proportional control; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879649

Filename

879649