Title :
Directly patternable thick film hybrid glass materials for micro-opto-mechanical structures
Author :
Rantala, J.T. ; Juuso, S. ; Levy, R. ; Kivimäki, L. ; Descour, M.R.
Author_Institution :
VTT Electron. & Infotech Oulu, Finland
Abstract :
The liquid phase deposition and direct UV writing method is applied for the fabrication of optical and mechanical structures into a photosensitive hybrid glass material. High optical quality thick films and structures are fabricated for the realization of a micro-optical table
Keywords :
liquid phase deposited coatings; liquid phase deposition; micro-optics; micromachining; optical fabrication; optical films; optical glass; polymerisation; spin coating; ultraviolet lithography; bulk micromachining; direct UV writing; directly patternable materials; free radical polymerisation; high optical quality thick films; liquid phase deposition; lithographic patterning; micro-optical table; micro-opto-mechanical structures; organic functional properties; passive alignment; photosensitive hybrid glass material; ring-opening polymerisation; spin coating; thick film hybrid glass materials; Apertures; Glass; Optical device fabrication; Optical films; Optical materials; Optical refraction; Optical scattering; Optical surface waves; Polymer films; Thick films;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879651
