Title :
Microfabricated probes for near-field optical microscopy
Author :
Heinzelmann, Harry ; Eckert, Rolf ; Freyland, J. Moritz ; Gersen, Henkjan ; Schürmann, Gregor ; Noell, Wilfried ; Staufer, Urs ; De Rooij, Nico
Author_Institution :
Nanoscale Technol., Centre Suisse d´´Electronique et de Microtechnique SA, Neuchatel, Switzerland
Abstract :
Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution
Keywords :
fluorescence; micro-optics; micromachining; near-field scanning optical microscopy; optical fabrication; SNOM aperture probe; cantilevered probes; integrated quartz tips; lateral resolution; microfabrication; near-field optical imaging; near-field optical microscopy probes; reproducibility; single fluorophores; Apertures; Fluorescence; Light sources; Optical films; Optical imaging; Optical microscopy; Optical scattering; Optical sensors; Probes; Silicon;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879658
