Title :
Scanning near-field optical microscope using cantilever integrated with light emitting diode, waveguide, aperture, and photodiode
Author :
Sasaki, M. ; Tanaka, K. ; Hane, K.
Author_Institution :
Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
The integrated probe is advantageous for reducing the system size and the alignment labor and for improving the reliability of the SNOM. Even when a multi-functional probe is used, the SNOM system requires to set additional bulky elements. The further integration of the SNOM system is still a great challenge. In this study, a highly integrated cantilever for SNOM is described. All components necessary for the SNOM system (LED light source, waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever
Keywords :
etching; integrated optics; micro-optics; micromachining; near-field scanning optical microscopy; optical fabrication; LED light source; anisotropic etching; aperture; freestanding cantilevers; highly integrated cantilever; nanometer size aperture tip; photodiode; scanning near-field optical microscope; tip fabrication; waveguide; Apertures; Atomic force microscopy; Integrated optics; Light emitting diodes; Optical films; Optical microscopy; Optical refraction; Optical waveguides; Photodiodes; Stimulated emission;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879659
