Scanning near-field optical microscope using cantilever integrated with light emitting diode, waveguide, aperture, and photodiode

Author

Sasaki, M. ; Tanaka, K. ; Hane, K.

Author_Institution

Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan

fYear

2000

fDate

2000

Firstpage

129

Lastpage

130

Abstract

The integrated probe is advantageous for reducing the system size and the alignment labor and for improving the reliability of the SNOM. Even when a multi-functional probe is used, the SNOM system requires to set additional bulky elements. The further integration of the SNOM system is still a great challenge. In this study, a highly integrated cantilever for SNOM is described. All components necessary for the SNOM system (LED light source, waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever

Keywords

etching; integrated optics; micro-optics; micromachining; near-field scanning optical microscopy; optical fabrication; LED light source; anisotropic etching; aperture; freestanding cantilevers; highly integrated cantilever; nanometer size aperture tip; photodiode; scanning near-field optical microscope; tip fabrication; waveguide; Apertures; Atomic force microscopy; Integrated optics; Light emitting diodes; Optical films; Optical microscopy; Optical refraction; Optical waveguides; Photodiodes; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879659

Filename

879659