Title :
Microfabricated solid immersion lens with metal aperture
Author :
Fletcher, Daniel A. ; Simanovskii, Dmitrii ; Palanker, Daniel ; Crozier, Kenneth B. ; Quate, Calvin F. ; Kino, Gordon S. ; Goodson, Kenneth E.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
We demonstrate spatial resolution better than λ/10 in the infrared with a transmittance of 10-3 using a microfabricated solid immersion lens and metal aperture
Keywords :
microlenses; micromachining; near-field scanning optical microscopy; optical fabrication; optical resolving power; silicon-on-insulator; IR transmittance; SOI wafer; Si; Si-SiO2; anodic bonding; imaging capability; metal aperture; microfabricated solid immersion lens; selective RIE; solid immersion microscopy; spatial resolution; Apertures; Focusing; Lenses; Optical films; Optical microscopy; Optical refraction; Optical variables control; Solids; Spatial resolution; Throughput;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879661
