DocumentCode
2572285
Title
An accelerometer incorporating a micro-laser encoder for a wide measurable range [for earthquake detection]
Author
Sawada, Renshi ; Higurashi, Eiji ; Itoh, Takahiro
Author_Institution
NTT Telecommun. Energy Labs., Kanagawa, Japan
fYear
2000
fDate
2000
Firstpage
145
Lastpage
146
Abstract
Two types of small and highly sensitive accelerometers that can measure a wide range of acceleration have been tentatively developed. The accelerometer incorporates an optical linear-micro-laser encoder. The measurable range is unlimited because the encoder can measure relative displacement to a long linear grating scale attached to a parallel two-plate cantilever with a seismic mass
Keywords
accelerometers; displacement measurement; measurement by laser beam; micro-optics; microsensors; optical planar waveguides; seismometers; Lissajous curve; earthquake detection; highly sensitive accelerometers; linear-micro-laser encoder; long linear grating scale; parallel two-plate cantilever; polyimide waveguide; relative displacement; seismic mass; wide measurable range; Acceleration; Accelerometers; Displacement measurement; Earthquakes; Gratings; Integrated optics; Optical sensors; Polyimides; Seismic measurements; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879667
Filename
879667
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