Title :
An accelerometer incorporating a micro-laser encoder for a wide measurable range [for earthquake detection]
Author :
Sawada, Renshi ; Higurashi, Eiji ; Itoh, Takahiro
Author_Institution :
NTT Telecommun. Energy Labs., Kanagawa, Japan
Abstract :
Two types of small and highly sensitive accelerometers that can measure a wide range of acceleration have been tentatively developed. The accelerometer incorporates an optical linear-micro-laser encoder. The measurable range is unlimited because the encoder can measure relative displacement to a long linear grating scale attached to a parallel two-plate cantilever with a seismic mass
Keywords :
accelerometers; displacement measurement; measurement by laser beam; micro-optics; microsensors; optical planar waveguides; seismometers; Lissajous curve; earthquake detection; highly sensitive accelerometers; linear-micro-laser encoder; long linear grating scale; parallel two-plate cantilever; polyimide waveguide; relative displacement; seismic mass; wide measurable range; Acceleration; Accelerometers; Displacement measurement; Earthquakes; Gratings; Integrated optics; Optical sensors; Polyimides; Seismic measurements; Semiconductor device measurement;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879667
