Title :
Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes
Author :
Wu, Xing-tao ; Brown, Richard A. ; Mathews, Smitha ; Farmer, K.R.
Keywords :
Capacitance; Electrodes; Electrostatics; Equations; Insulation; Mirrors; Optical attenuators; Silicon compounds; Springs; Voltage;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879670
