Tunable microwave wafer probes

Author

Rabjohn, G. ; Surridge, R.

Author_Institution

BNR, Ottawa, Ont., Canada

fYear

1988

fDate

6-9 Nov. 1988

Firstpage

213

Lastpage

216

Abstract

An electronically tuned microwave wafer probe using varactor diodes as tuning elements has been fabricated. This probe can be used for the acquisition of the noise parameters of active devices. A complete set of algorithms has been installed in a simple computer program to allow these measurements to be performed automatically. The probe may be used to generate wafer maps of noise parameters, which are useful for the development of low-noise device processes, and in the monitoring of the performance of low-noise integrated circuits. The authors describe the fabrication of the probe, and detail its use in an automated noise-measurement system.<>

Keywords

MMIC; automatic test equipment; automatic testing; calibration; electric noise measurement; electron device noise; integrated circuit testing; microwave devices; microwave measurement; probes; tuning; varactors; active devices; automated noise-measurement system; calibration; computer program; electronically tunable probes; fabrication; low-noise integrated circuits; microwave wafer probes; noise parameters; varactor diodes; Active noise reduction; Diodes; Integrated circuit measurements; Integrated circuit noise; Microwave devices; Noise generators; Performance evaluation; Probes; Tunable circuits and devices; Varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1988. Technical Digest 1988., 10th Annual IEEE

Conference_Location

Nashville, Tennessee, USA

Type

conf

DOI

10.1109/GAAS.1988.11060

Filename

11060