DocumentCode
2573156
Title
Foundry technology for the next decade
Author
Sun, J.Y.C. ; Shang-Yi Chiang ; Liu, M.
Author_Institution
Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan
fYear
1998
fDate
6-9 Dec. 1998
Firstpage
321
Lastpage
324
Abstract
Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.
Keywords
integrated circuit manufacture; technological forecasting; foundry technology; future developments; integrated device manufacture; overview; system company; virtual fab; CMOS logic circuits; Costs; Foundries; History; Isolation technology; LAN interconnection; Lifting equipment; Lithography; Logic devices; Sun;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-4774-9
Type
conf
DOI
10.1109/IEDM.1998.746364
Filename
746364
Link To Document