Title :
Foundry technology for the next decade
Author :
Sun, J.Y.C. ; Shang-Yi Chiang ; Liu, M.
Author_Institution :
Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan
Abstract :
Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.
Keywords :
integrated circuit manufacture; technological forecasting; foundry technology; future developments; integrated device manufacture; overview; system company; virtual fab; CMOS logic circuits; Costs; Foundries; History; Isolation technology; LAN interconnection; Lifting equipment; Lithography; Logic devices; Sun;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746364
