Title :
Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices
Author :
Furbock, C. ; Seliger, N. ; Pogany, D. ; Litzenberger, M. ; Gornik, E. ; Stecher, M. ; Gosser, H. ; Werner, W.
Author_Institution :
Inst. for Solid State Electron., TV Vienna, Austria
Abstract :
We present a study of thermal effects in Smart Power Electrostatic Discharge (ESD) protection structures by application of a noninvasive infrared backside laserprober technique. The temperature increase in the device active area is obtained from the time resolved measurements of optical phase changes under ESD-like high current stress. Results of temperature distribution and thermal dynamics for different device operation modes are presented.
Keywords :
electrostatic discharge; light interferometry; measurement by laser beam; power integrated circuits; protection; temperature distribution; temperature measurement; ESD protection device; current stress; light interferometry; noninvasive infrared backside laser probe; smart power; temperature distribution; thermal dynamics; time resolved measurement; Area measurement; Current measurement; Electrostatic discharge; Electrostatic measurements; Laser modes; Phase measurement; Power lasers; Protection; Stress measurement; Temperature;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746451
