Vacuum Degree Measurement of MEMS Vacuum Package Based on DDS

Author

Shi, Xiong ; Zhu, Guangxi ; Gan, Zhiyin ; Liu, Sheng

Author_Institution

Dept. of Electron. & Inf. Eng., Huazhong Univ. of Sci. & Technol., Hubei

fYear

2006

fDate

26-29 Aug. 2006

Firstpage

1

Lastpage

7

Abstract

This paper adopts quartz crystal as a sensor for measurement of vacuum degree which is integrated into the internal cavity of the MEMS package and is excited by an exciting source which is formed by direct digital synthesizer (DDS). The corresponding voltage signal is provided as output by using phase and amplitude comparison circuits to compare the phase and amplitude of the signal from both ends of the quartz crystal. Then it is transmitted to the SCM after AD conversion and can measure and monitor the vacuum degree of the internal cavity of the MEMS package after processing and calibration

Keywords

analogue-digital conversion; calibration; direct digital synthesis; micromechanical devices; packaging; quartz; vacuum measurement; AD conversion; MEMS vacuum package; SCM; calibration; direct digital synthesizer; internal cavity; quartz crystal; resonance frequency; resonance impedance; vacuum degree measurement; voltage signal; Electronics packaging; Impedance; Integrated circuit measurements; Micromechanical devices; Monitoring; Oscillators; Resonance; Signal processing; Vacuum systems; Vacuum technology; direct digital frequency synthesizer; quartz crystal; resonance frequency; resonance impedance; vacuum degree;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Packaging Technology, 2006. ICEPT '06. 7th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0619-6

Electronic_ISBN

1-4244-0620-X

Type

conf

DOI

10.1109/ICEPT.2006.359732

Filename

4198853