• DocumentCode
    2575778
  • Title

    An advanced flash memory technology on SOI

  • Author

    Burnett, D. ; Shum, D. ; Baker, K.

  • Author_Institution
    NVM Technol. Center, Motorola Inc., Austin, TX, USA
  • fYear
    1998
  • fDate
    6-9 Dec. 1998
  • Firstpage
    983
  • Lastpage
    985
  • Abstract
    For the first time, EEPROM functionality is demonstrated on double-poly bitcells on SOI using the same layout as standard bulk CMOS bitcells. By using FN tunneling for program and erase (P/E) operations, the P/E characteristics of the floating-body SOI bitcell are comparable to the bulk CMOS characteristics. Bitcell endurance for SOI cells show significantly less window closure than bulk CMOS cells. High-voltage SOI device characteristics are also compared with bulk devices. With sufficient body contacts, the high-voltage SOI devices can support the required bitcell voltages.
  • Keywords
    CMOS memory circuits; flash memories; semiconductor device breakdown; silicon-on-insulator; tunnelling; EEPROM functionality; FN tunneling; HV SOI device characteristics; Si; advanced flash memory technology; bitcell endurance; body contacts; double-poly bitcells; erase characteristics; floating-body SOI bitcell; program characteristics; CMOS technology; Degradation; EPROM; Electrons; Flash memory; Hot carriers; Nonvolatile memory; Silicon; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0163-1918
  • Print_ISBN
    0-7803-4774-9
  • Type

    conf

  • DOI
    10.1109/IEDM.1998.746519
  • Filename
    746519