DocumentCode :
2576388
Title :
Overview Of Microelectromechanical Systems And Design Processes
Author :
Tang, William C.
Author_Institution :
MEMS Technology Group Jet Propulsion Laboratory Pasadena, California 91109-8099
fYear :
1997
fDate :
9-13 June 1997
Firstpage :
670
Lastpage :
673
Keywords :
Design automation; Microelectromechanical devices; Microelectromechanical systems; Micromachining; Micromechanical devices; Permission; Predictive models; Process design; Robustness; Solid modeling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 1997. Proceedings of the 34th
Conference_Location :
Anaheim, CA, USA
ISSN :
0738-100X
Print_ISBN :
0-7803-4093-0
Type :
conf
DOI :
10.1109/DAC.1997.597229
Filename :
597229
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2576388
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