DocumentCode :
2576719
Title :
Structured Design Of Microelectromechanical Systems
Author :
Mukherjee, Tamal ; Fedder, Gary K.
Author_Institution :
Carnegie Mellon University Pittsburgh, PA, 15213-3890
fYear :
1997
fDate :
9-13 June 1997
Firstpage :
680
Lastpage :
685
Keywords :
Actuators; Design automation; Electromechanical sensors; Fabrication; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Optical resonators; Sensor systems; Topology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 1997. Proceedings of the 34th
Conference_Location :
Anaheim, CA, USA
ISSN :
0738-100X
Print_ISBN :
0-7803-4093-0
Type :
conf
DOI :
10.1109/DAC.1997.597231
Filename :
597231
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2576719
بازگشت