DocumentCode :
2576888
Title :
Algorithms For Coupled Domain Mems Simulation
Author :
Aluru, N. ; White, J.
Author_Institution :
Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge, MA 02139
fYear :
1997
fDate :
9-13 June 1997
Firstpage :
686
Lastpage :
690
Keywords :
Analytical models; Computational modeling; Contracts; Electrostatics; Finite element methods; Micromechanical devices; Partial differential equations; Permission; Solid modeling; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 1997. Proceedings of the 34th
Conference_Location :
Anaheim, CA, USA
ISSN :
0738-100X
Print_ISBN :
0-7803-4093-0
Type :
conf
DOI :
10.1109/DAC.1997.597232
Filename :
597232
Link To Document :
بازگشت