DocumentCode
2576888
Title
Algorithms For Coupled Domain Mems Simulation
Author
Aluru, N. ; White, J.
Author_Institution
Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge, MA 02139
fYear
1997
fDate
9-13 June 1997
Firstpage
686
Lastpage
690
Keywords
Analytical models; Computational modeling; Contracts; Electrostatics; Finite element methods; Micromechanical devices; Partial differential equations; Permission; Solid modeling; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation Conference, 1997. Proceedings of the 34th
Conference_Location
Anaheim, CA, USA
ISSN
0738-100X
Print_ISBN
0-7803-4093-0
Type
conf
DOI
10.1109/DAC.1997.597232
Filename
597232
Link To Document