• DocumentCode
    2576888
  • Title

    Algorithms For Coupled Domain Mems Simulation

  • Author

    Aluru, N. ; White, J.

  • Author_Institution
    Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge, MA 02139
  • fYear
    1997
  • fDate
    9-13 June 1997
  • Firstpage
    686
  • Lastpage
    690
  • Keywords
    Analytical models; Computational modeling; Contracts; Electrostatics; Finite element methods; Micromechanical devices; Partial differential equations; Permission; Solid modeling; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference, 1997. Proceedings of the 34th
  • Conference_Location
    Anaheim, CA, USA
  • ISSN
    0738-100X
  • Print_ISBN
    0-7803-4093-0
  • Type

    conf

  • DOI
    10.1109/DAC.1997.597232
  • Filename
    597232