Title :
Algorithms For Coupled Domain Mems Simulation
Author :
Aluru, N. ; White, J.
Author_Institution :
Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge, MA 02139
Keywords :
Analytical models; Computational modeling; Contracts; Electrostatics; Finite element methods; Micromechanical devices; Partial differential equations; Permission; Solid modeling; Stress;
Conference_Titel :
Design Automation Conference, 1997. Proceedings of the 34th
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-4093-0
DOI :
10.1109/DAC.1997.597232