Title :
Photonic crystals in lithium niobate by ion-beam enhanced etching
Author :
Hartung, Holger ; Geiss, Reinhard ; Gischkat, Thomas ; Schrempel, Frank ; Iliew, Rumen ; Pertsch, Thomas ; Lederer, Falk ; Wesch, Werner ; Kley, Ernst-Bernhard ; Tünnermann, Andreas
Author_Institution :
Inst. of Appl. Phys., Friedrich-Schiller-Univ. Jena, Jena
Abstract :
A photonic crystal defect waveguide fabricated in a freestanding LiNbO3 membrane is presented. The three dimensional patterning was done by means of ion-beam enhanced etching.
Keywords :
crystal defects; ion beam applications; lithium compounds; membranes; optical fabrication; optical materials; optical waveguides; photonic crystals; sputter etching; LiNbO3; freestanding membrane; ion beam enhanced etching; lithium niobate; photonic crystal defect waveguide; three dimensional patterning; waveguide fabrication; Biomembranes; Crystalline materials; Etching; Lithium niobate; Nonlinear optics; Optical harmonic generation; Optical waveguides; Periodic structures; Photonic band gap; Photonic crystals;
Conference_Titel :
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location :
Innsbruck
Print_ISBN :
978-1-4244-2610-2
Electronic_ISBN :
978-1-4244-2611-9
DOI :
10.1109/LEOSWT.2009.4771656