DocumentCode :
2577238
Title :
Two-dimensional micro conveyer with integrated electrostatic actuators
Author :
Edo, M. ; Watanabe, Y. ; Morita, O. ; Nakazawa, H. ; Yonezawa, E.
Author_Institution :
Functional Device Lab., Fuji Electr. Corp. Res. & Dev. Ltd., Yokosuka, Japan
fYear :
1999
fDate :
21-21 Jan. 1999
Firstpage :
43
Lastpage :
48
Abstract :
In this paper, we present a two-dimensional micro-conveyer that utilizes electrostatic force. This conveyer with integrated electrostatic actuators is able to convey an object weighing several milligrams with high precision. The actuators are 350/spl times/350 /spl mu/m/sup 2/ in area and are constructed from support beams, an oscillating mass and a conveyance tip above the mass. The actuators are fabricated by a process consisting of the steps of photoresist and photosensitive polyimide lithography, electroplating, and a photoresist sacrificial layer process. The maximum horizontal displacement was 0.2 /spl mu/m at the maximum vertical displacement of 6.7 /spl mu/m with a drive frequency of 10 Hz and applied voltage of 300 V. A silicon chip of 1.4/spl times/1.4 mm in area and 1.4 mg of weight can be conveyed in a two-dimensional direction.
Keywords :
conveyors; electroplating; electrostatic actuators; etching; micromachining; micromanipulators; photoresists; 2D micro conveyer; 300 V; 350 micron; conveyance tip; electroplating; high precision conveying; integrated electrostatic actuators; maximum horizontal displacement; maximum vertical displacement; micromanipulation; oscillating mass; photoresist sacrificial layer process; photosensitive polyimide lithography; process flow; seed layer etching; support beams; Cities and towns; Drives; Electrodes; Electrostatic actuators; Frequency; Lithography; Research and development; Resists; Silicon; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
ISSN :
1084-6999
Print_ISBN :
0-7803-5194-0
Type :
conf
DOI :
10.1109/MEMSYS.1999.746749
Filename :
746749
Link To Document :
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