Realization and characterization of magnetic media deposited on side edge of patterned silicon dot arrays

Author

Landis, S. ; Bayle, P. ; Rodmacq, B. ; Baltz, V. ; Dieny, Bernard

Author_Institution

CEA, Grenoble, France

fYear

2003

fDate

29-31 Oct. 2003

Firstpage

60

Lastpage

61

Abstract

Magnetic materials were deposited by sputtering onto patterned arrays of silicon dots. Structural characterizations (i.e. AFM and TEM observations) have been performed on (Co/Pt) multilayers deposited on line arrays. The MFM image reveals that only the side-walls of dots which are covered by pure cobalt and magnetic. Moreover, they present a bipolar or a single pole contrast which suggest that this technique could be used for the fabrication of high density storage media.

Keywords

atomic force microscopy; cobalt; ferromagnetic materials; magnetic disc storage; magnetic force microscopy; magnetic multilayers; platinum; sputter deposition; transmission electron microscopy; AFM; Co-Pt; Co/Pt multilayers; MFM; Si; TEM; cobalt; magnetic media; patterned silicon dot arrays; single pole contrast; sputtering; Chromium; Fabrication; Magnetic flux; Magnetic force microscopy; Magnetic materials; Magnetic separation; Material storage; Nonhomogeneous media; Silicon; US Department of Transportation;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International

Conference_Location

Tokyo, Japan

Print_ISBN

4-89114-040-2

Type

conf

DOI

10.1109/IMNC.2003.1268518

Filename

1268518