Title :
A modular integrated pressure control unit for gases
Author :
Schaible, J. ; Messner, S. ; Muller, M. ; Fuchs, N. ; Sandmaier, H. ; Zengerle, R.
Author_Institution :
Inst. of Micromachining & Inf. Technol., Hahn-Schickard-Gesellschaft, Villingen, Germany
Abstract :
A new concept for application specific realization of micropneumatical systems will be presented for the first time. It allows the modular integration of micromechanical valves (2-way, 3-way) and sensors (pressure, flow, etc.) for creating closed loop systems having minimized dead volume and response time. Following the smallest industrial standard size of pneumatic valves, the width of each component housing is fixed to 10 mm. The concept for modular integration has been successfully proved by building up a pressure control unit for gases. It basically consists of a microprocessor for digital control, two electrostatically actuated microvalves, electronics to drive the valves and a pressure sensor.
Keywords :
closed loop systems; digital control; electropneumatic control equipment; microfluidics; microvalves; pressure control; pressure sensors; 10 mm; application specific realization; closed loop systems; digital control; electrical connectors; electrostatically actuated microvalves; flow sensors; fluidic sensors; intelligent systems; micromechanical valves; micropneumatical systems; microprocessor; minimized dead volume; modular integration; pneumatic valves; pressure control unit for gases; pressure sensors; valve drive electronics; valve housing; Closed loop systems; Delay; Digital control; Electrical equipment industry; Gases; Micromechanical devices; Microprocessors; Pressure control; Sensor systems; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746756
