Sub-wavelength imaging of optical modes on silicon microdisk cavities using a near-field probing technique

Author

Eftekhar, Ali Asghar ; Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA

fYear

2009

fDate

12-14 Jan. 2009

Firstpage

92

Lastpage

93

Abstract

We demonstrate sub-wavelength near-field imaging of the optical modes in high Q silicon microdisks. Mode profiles with a spatial resolution of ~20 nm are obtained by characterizing the perturbative effects of a small scanning AFM tip.

Keywords

atomic force microscopy; elemental semiconductors; image resolution; micro-optomechanical devices; microcavities; micromechanical resonators; near-field scanning optical microscopy; optical resonators; silicon; Si; atomic force microscopy; microdisk resonators; mode profiles; near-field probing technique; optical modes; perturbative effects; scanning AFM tip; silicon microdisk cavity; spatial resolution; sub-wavelength imaging; Nonlinear optics; Optical coupling; Optical imaging; Optical resonators; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Resonance; Silicon; (130.3120) Integrated optics devices; (180.4243) Near-field microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE/LEOS Winter Topicals Meeting Series, 2009

Conference_Location

Innsbruck

Print_ISBN

978-1-4244-2610-2

Electronic_ISBN

978-1-4244-2611-9

Type

conf

DOI

10.1109/LEOSWT.2009.4771672

Filename

4771672