Title :
Spectral infrared absorption of CMOS thin film stacks
Author :
Schneeberger, N. ; Paul, O. ; Baltes, H.
Author_Institution :
Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
We report the measurement of the relative spectral infrared absorptance of a complete set of CMOS thin film stacks. The measurements were made in the spectrum from 2 /spl mu/m to 14.6 /spl mu/m. The thin film stacks are used in micromachined thermal infrared sensors. The presented data allow more precise modeling of these sensors.
Keywords :
CMOS digital integrated circuits; CMOS image sensors; infrared detectors; optical variables measurement; 1 mum; 2 to 14.6 mum; CMOS thin film stacks; micromachined thermal infrared sensors; modeling; relative spectral infrared absorptance; spectral infrared absorption; CMOS technology; Electromagnetic wave absorption; Filters; Gratings; Infrared sensors; Infrared spectra; Optical device fabrication; Testing; Transistors; Wavelength measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746780
