Title :
Fabrication of integrated carbon nanotube field emitter with extraction electrode
Author :
Oota, S. ; Kawata, H. ; Yasuda, M. ; Pan, L. ; Akita, S. ; Nakayama, Y.
Author_Institution :
Osaka Prefecture Univ., Sakai, Japan
Abstract :
In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated CNT field emitter fabrication by use of the selective growth of CNT between Cr and Si surface.
Keywords :
carbon nanotubes; chemical vapour deposition; chromium; electrodes; field emitter arrays; silicon; C-Cr-Si; Cr surface; Si surface; gate electrode; integrated CNT field emitter; integrated carbon nanotube field emitter; wafer; Carbon nanotubes; Chromium; Electrodes; Etching; Fabrication; Helium; Iron alloys; Plasma applications; Plasma devices; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268527
