DocumentCode
2577578
Title
Fabrication of absorber-embedded in membrane type deep X-ray exposure mask with wide exposure area made with Si substrate
Author
Fujimura, T. ; Ikeda, A. ; Etoh, S. ; Hattori, R. ; Kuroki, Y. ; Hidaka, M. ; Chang, S.S.
Author_Institution
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
86
Lastpage
87
Abstract
In this paper we study about the fabrication of absorber-embedded in membrane type deep X-ray exposure mask with wide exposure area made with Si substrate.
Keywords
X-ray masks; electroplating; micromachining; silicon compounds; Si; Si substrate; SiO/sub 2/; absorber-embedded membrane; deep X-ray exposure mask; Biomembranes; Etching; Fabrication; Gold; Laboratories; Lithography; Microstructure; Plasma applications; Plasma x-ray sources; Strontium;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268531
Filename
1268531
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