Title :
Re-configurable fluid circuits by PDMS elastomer micromachining
Author :
Armani, D. ; Liu, C. ; Aluru, N.
Author_Institution :
Microelectron. Lab., Illinois Univ., Urbana, IL, USA
Abstract :
We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young´s modulus and the adhesion energy have been determined experimentally. The magnitude of Young´s modulus ranges from 8.7/spl times/10/sup 5/ Pa to 3.6/spl times/10/sup 5/ Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.
Keywords :
Young´s modulus; adhesion; elastomers; microfluidics; micromachining; moulding; PDMS composition; PDMS elastomer; Young´s modulus; adhesion energy; chemical treatment; flow interconnects; mechanical characteristics; micro molding; microfabrication technique; microfluidics; micromachining; polydimethylsiloxane; reconfigurable fluid circuits; Adhesives; Biological materials; Bonding; Chemicals; Circuits; Connectors; Fabrication; Fluidics; Micromachining; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746817
