Title :
Development of microconnector with automatic connecting/disconnecting mechanism
Author :
Okuyama, H. ; Haga, T. ; Emura, K. ; Takada, H.
Author_Institution :
Harima Res. Labs., Sumitomo Electr. Ind. Ltd., Hyogo, Japan
Abstract :
We have developed an electrical and mechanical microconnector with an automatic connecting/disconnecting mechanism, using magnetic force. The diameter and thickness of the microconnector are 2.5 mm and 2 mm, respectively. We have confirmed the automatic connection/disconnection in the distance of 550 /spl mu/m between opposing microconnectors, and electrical connection at 500 mA. The driving actuator for automatic connection/disconnection is realized through the use of an electromagnet, permanent magnet and spiral spring. The electrical terminal is designed to minimize the contact force in the automatic connecting/disconnecting mechanism, and is fabricated using deep X-ray lithography.
Keywords :
LIGA; electric connectors; electromagnetic actuators; electromagnets; microactuators; micromachining; permanent magnets; 2 mm; 2.5 mm; 500 mA; automatic connecting/disconnecting mechanism; cantilever terminals; chain-type micromachine systems; contact force; deep X-ray lithography; driving actuator; electrical microconnector; electrical terminal; electroforming; electromagnet; magnetic force; mechanical microconnector; minimised contact force; permanent magnet; sacrificial etching; spiral spring; tapered terminals; Connectors; Electromagnetic forces; Electromagnets; Electrostatic actuators; Joining processes; Packaging; Permanent magnets; Piezoelectric actuators; Spirals; Springs;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746828