Title :
Formation of microbumps and protrusions on metal thin films by localized laser irradiation
Author :
Moening, Joseph P. ; Thanawala, Sachin S. ; Georgiev, Daniel G.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Toledo, Toledo, OH, USA
Abstract :
We present results on the formation of microbumps, and high-aspect-ratio nano-scale protrusions on metal films as a result of single-pulse localized laser irradiation. A Q-switched nanosecond-pulse Nd:YAG laser, emitting at its fourth harmonic of 266 nm, was employed. Gold or platinum films with thicknesses of several hundred nanometers were irradiated in ambient or under low-vacuum conditions, with circular laser spots, several micrometers in diameter. A mask projection technique was used to generate these spot patterns. The resulting structures were examined by scanning electron microscopy. The formation mechanism of these structures is briefly discussed.
Keywords :
Q-switching; gold; laser beam effects; metallic thin films; neodymium; platinum; scanning electron microscopy; solid lasers; Q-switched laser; YAG:Nd; gold films; low vacuum conditions; mask projection; metal thin films; microbump formation; nanoscale protrusions; nanosecond-pulse laser; platinum films; scanning electron microscopy; single-pulse localized laser irradiation; solid laser; Chemical lasers; Gold; Laser modes; Laser theory; Optical films; Optical materials; Substrates; Surface emitting lasers; Transistors; Ultrafast optics; High-aspect ratio; Laser modification; Microstructuring; Nano-scale; Nanosecond laser;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
Conference_Location :
Traverse City, MI
Print_ISBN :
978-1-4244-4695-7
Electronic_ISBN :
978-1-4244-4696-4
DOI :
10.1109/NMDC.2009.5167525
