DocumentCode
2578276
Title
Self-generated light emitting device using micromachined Si mirror arrays
Author
Byeong-Kwon Ju ; Yun-Hi Lee ; Myung-Hwan Oh
Author_Institution
Div. of Electron. & Inf. Technol., Korea Inst. of Sci. & Technol., Seoul, South Korea
fYear
1999
fDate
21-21 Jan. 1999
Firstpage
371
Lastpage
375
Abstract
In this work, we fabricated tip-shaped Si reflector arrays which are conventionally studied for the electron emitter in FED field and report preliminary results of light emission observed by TFEL structure with the Si reflector. As a result, 3600 reflectors was formed within one pixel and these picture elements create a well concentrated visible light around the point reflectors under the bipolar pulse excitation.
Keywords
elemental semiconductors; light emitting devices; micro-optics; micromachining; mirrors; optical arrays; optical fabrication; silicon; Si; Si mirror array; electron emitter; fabrication; field emission display; micromachining; self-generated light emitting device; thin film electroluminescent device; tip-shaped reflector; Brightness; Electrodes; Electron guns; Etching; Field emitter arrays; Mirrors; Optical arrays; Optical propagation; Thin film devices; Zinc compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location
Orlando, FL, USA
ISSN
1084-6999
Print_ISBN
0-7803-5194-0
Type
conf
DOI
10.1109/MEMSYS.1999.746857
Filename
746857
Link To Document