• DocumentCode
    2578312
  • Title

    Microstructure and electronic properties of zinc nitride thin films

  • Author

    Georgiev, Daniel G. ; Moening, Joseph P. ; Naleshwar, Sandeepkumar ; Jayatissa, Ahalapitiya H.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of Toledo, Toledo, OH, USA
  • fYear
    2009
  • fDate
    2-5 June 2009
  • Firstpage
    33
  • Lastpage
    37
  • Abstract
    Results from an initial study on the preparation, microstructure, and optical and electrical properties of zinc nitride films are presented. Zinc nitride has a lower bandgap than ZnO and can be fabricated in a thin film form by sputtering and other methods. This material has a potential as a new semiconductor material in photovoltaic, optoelectronic and other applications, offering additional advantages such as environment-friendly processing and potentially low fabrication cost. A main goal of our studies, which are still in progress, is establishing correlations between the fabrication conditions and the structure and relevant properties. Junctions and interfaces with metals or zinc oxide will be of interest as well.
  • Keywords
    Raman spectroscopy; semiconductor thin films; sputter deposition; zinc compounds; Raman spectroscopy; Zn3N2; electrical properties; electronic properties; microstructure; optical properties; reactive sputtering; semiconductor material; zinc nitride thin films; Microstructure; Optical device fabrication; Optical films; Photonic band gap; Semiconductor films; Semiconductor materials; Semiconductor thin films; Sputtering; Transistors; Zinc oxide; AES; Optical properties; Raman spectroscopy; Reactive Sputtering; Thin Films; XPS; Zinc nitride;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
  • Conference_Location
    Traverse City, MI
  • Print_ISBN
    978-1-4244-4695-7
  • Electronic_ISBN
    978-1-4244-4696-4
  • Type

    conf

  • DOI
    10.1109/NMDC.2009.5167531
  • Filename
    5167531