DocumentCode
2578312
Title
Microstructure and electronic properties of zinc nitride thin films
Author
Georgiev, Daniel G. ; Moening, Joseph P. ; Naleshwar, Sandeepkumar ; Jayatissa, Ahalapitiya H.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of Toledo, Toledo, OH, USA
fYear
2009
fDate
2-5 June 2009
Firstpage
33
Lastpage
37
Abstract
Results from an initial study on the preparation, microstructure, and optical and electrical properties of zinc nitride films are presented. Zinc nitride has a lower bandgap than ZnO and can be fabricated in a thin film form by sputtering and other methods. This material has a potential as a new semiconductor material in photovoltaic, optoelectronic and other applications, offering additional advantages such as environment-friendly processing and potentially low fabrication cost. A main goal of our studies, which are still in progress, is establishing correlations between the fabrication conditions and the structure and relevant properties. Junctions and interfaces with metals or zinc oxide will be of interest as well.
Keywords
Raman spectroscopy; semiconductor thin films; sputter deposition; zinc compounds; Raman spectroscopy; Zn3N2; electrical properties; electronic properties; microstructure; optical properties; reactive sputtering; semiconductor material; zinc nitride thin films; Microstructure; Optical device fabrication; Optical films; Photonic band gap; Semiconductor films; Semiconductor materials; Semiconductor thin films; Sputtering; Transistors; Zinc oxide; AES; Optical properties; Raman spectroscopy; Reactive Sputtering; Thin Films; XPS; Zinc nitride;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
Conference_Location
Traverse City, MI
Print_ISBN
978-1-4244-4695-7
Electronic_ISBN
978-1-4244-4696-4
Type
conf
DOI
10.1109/NMDC.2009.5167531
Filename
5167531
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