Title :
Three dimensional SMA microelectrodes with clipping structure for insect neural recording
Author :
Takeuchi, S. ; Shimoyama, I.
Author_Institution :
Dept. of Mech. Inf., Tokyo Univ., Japan
Abstract :
A microelectrode, with clipping structure for insect neural recording, was designed and fabricated by using a Shape Memory Alloy (SMA) thin film. The SMA thin films (TiNi: Titanium Nickel) are deposited by using RF magnetron sputtering, and patterned by HF-HNO/sub 3/ wet etching. The transformation temperatures of the SMA thin films measured 54/spl deg/C(A*) and 50/spl deg/C(M*). The SMA micro-electrode consists of one clipping structure (720 /spl mu/m/spl times/480 /spl mu/m) and two probes(600 /spl mu/m/spl times/70 /spl mu/m). The desired three-dimensional shape is given to the electrode by bonded wire while annealing. The SMA microelectrode can clip a nerve cord tightly, and neural activity from a living insect has been successfully recorded with this SMA microelectrode.
Keywords :
annealing; biomedical electrodes; etching; metallic thin films; microelectrodes; neurophysiology; nickel alloys; shape memory effects; sputtered coatings; titanium alloys; RF magnetron sputtering; TiNi; annealing; clipping structure; insect neural recording; shape memory alloy thin film; three-dimensional SMA microelectrode; transformation temperature; wet etching; wire bonding; Electrodes; Insects; Microelectrodes; Nickel; Radio frequency; Shape memory alloys; Sputtering; Temperature; Titanium; Wet etching;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746873
