DocumentCode
2578582
Title
Effect of catalyst and underlayer metal on PECVD growth of vertically aligned carbon nanotubes
Author
Sun, Xuhui ; Li, Ke ; Wu, Wen ; Saito, Tsutomu ; Yang, Cary Y.
Author_Institution
Center for Nanostruct., Santa Clara Univ., Santa Clara, CA, USA
fYear
2009
fDate
2-5 June 2009
Firstpage
1
Lastpage
2
Abstract
Growth behavior of vertically aligned carbon nanotubes (CNTs) grown on different underlayer metals is investigated. The average diameter, diameter distribution, density, and growth rate of CNTs exhibit strong correlation with the choice of metal and catalyst. These observations are analyzed in terms of the interactions between the catalyst and the underlayer metal.
Keywords
carbon nanotubes; catalysts; metals; plasma CVD; C; PECVD growth; catalyst; metal underlayer; strong correlation; vertically aligned carbon nanotubes; Annealing; CMOS technology; Carbon nanotubes; Chromium; Iron; Nanostructures; Plasma temperature; Scanning electron microscopy; Semiconductor films; Substrates; PECVD; carbon nanotube synthesis; vertical aligned CNT;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
Conference_Location
Traverse City, MI
Print_ISBN
978-1-4244-4695-7
Electronic_ISBN
978-1-4244-4696-4
Type
conf
DOI
10.1109/NMDC.2009.5167547
Filename
5167547
Link To Document